A Compact and Low-Loss MMI Coupler Fabricated With CMOS Technology
We present the design, fabrication, and measurement of a compact and low-loss multimode interference (MMI) coupler based on the silicon nanowire waveguide. The device is carefully designed to achieve both a good performance and a compact size by using the mode matching method. The device is fabricat...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2012-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/6363508/ |