Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems
(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbiu...
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2012-10-01
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Online Access: | http://www.mdpi.com/2079-4991/2/4/312 |
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doaj-81cf0acdb363448f87de9233a0d6ce482020-11-24T23:17:47ZengMDPI AGNanomaterials2079-49912012-10-012431232810.3390/nano2040312Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound SystemsHideo HonmaChristopher E. J. Cordonier(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.http://www.mdpi.com/2079-4991/2/4/312photo-patterningdirect patterningmulti-layer filmsmulti-touch panelironcopperlanthanides |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Hideo Honma Christopher E. J. Cordonier |
spellingShingle |
Hideo Honma Christopher E. J. Cordonier Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems Nanomaterials photo-patterning direct patterning multi-layer films multi-touch panel iron copper lanthanides |
author_facet |
Hideo Honma Christopher E. J. Cordonier |
author_sort |
Hideo Honma |
title |
Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems |
title_short |
Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems |
title_full |
Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems |
title_fullStr |
Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems |
title_full_unstemmed |
Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems |
title_sort |
simultaneous patterning of independent metal/metal oxide multi-layer films using two-tone photo-acid generating compound systems |
publisher |
MDPI AG |
series |
Nanomaterials |
issn |
2079-4991 |
publishDate |
2012-10-01 |
description |
(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching. |
topic |
photo-patterning direct patterning multi-layer films multi-touch panel iron copper lanthanides |
url |
http://www.mdpi.com/2079-4991/2/4/312 |
work_keys_str_mv |
AT hideohonma simultaneouspatterningofindependentmetalmetaloxidemultilayerfilmsusingtwotonephotoacidgeneratingcompoundsystems AT christopherejcordonier simultaneouspatterningofindependentmetalmetaloxidemultilayerfilmsusingtwotonephotoacidgeneratingcompoundsystems |
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