Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection

Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection

We describe a device for inter-chip or intra-chip optical communications that contains the Circular Defect in photonic crystal (CirD) lasers array driven by vertical current injection. In order to improve the conductivity of the structure while also preventing current leakage, we introduce the obliq...

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Main Authors: Hanqiao Ye, Ryota Saeki, Yifan Xiong, Takashi Kogure, Masato Morifuji, Hirotake Kajii, Akihiro Maruta, Masahiko Kondow
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Applied Sciences
Subjects:
optical communications
photonic crystal laser
electron beam evaporation
Online Access:https://www.mdpi.com/2076-3417/10/23/8377
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spelling doaj-818116689c3d483fbb90edd1644f782e2020-11-27T08:02:58ZengMDPI AGApplied Sciences2076-34172020-11-01108377837710.3390/app10238377Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current InjectionHanqiao Ye0Ryota Saeki1Yifan Xiong2Takashi Kogure3Masato Morifuji4Hirotake Kajii5Akihiro Maruta6Masahiko Kondow7Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanGraduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanGraduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanGraduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanGraduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanGraduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanGraduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanGraduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanWe describe a device for inter-chip or intra-chip optical communications that contains the Circular Defect in photonic crystal (CirD) lasers array driven by vertical current injection. In order to improve the conductivity of the structure while also preventing current leakage, we introduce the oblique deposition of electrodes on a photonic crystal pattern by using an electron beam evaporation apparatus. The performance of an electrode is investigated by a transmission line method, and the CirD structure is fabricated with the electrode. We analyze the voltage-current relationship and confirm the CirD structure’s low resistance of under 1 kΩ.https://www.mdpi.com/2076-3417/10/23/8377optical communicationsphotonic crystal laserelectron beam evaporation
collection DOAJ
language English
format Article
sources DOAJ
author Hanqiao Ye
Ryota Saeki
Yifan Xiong
Takashi Kogure
Masato Morifuji
Hirotake Kajii
Akihiro Maruta
Masahiko Kondow
spellingShingle Hanqiao Ye
Ryota Saeki
Yifan Xiong
Takashi Kogure
Masato Morifuji
Hirotake Kajii
Akihiro Maruta
Masahiko Kondow
Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection
Applied Sciences
optical communications
photonic crystal laser
electron beam evaporation
author_facet Hanqiao Ye
Ryota Saeki
Yifan Xiong
Takashi Kogure
Masato Morifuji
Hirotake Kajii
Akihiro Maruta
Masahiko Kondow
author_sort Hanqiao Ye
title Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection
title_short Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection
title_full Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection
title_fullStr Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection
title_full_unstemmed Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection
title_sort oblique deposition of ti/pt/au electrode on photonic crystal for vertical current injection
publisher MDPI AG
series Applied Sciences
issn 2076-3417
publishDate 2020-11-01
description We describe a device for inter-chip or intra-chip optical communications that contains the Circular Defect in photonic crystal (CirD) lasers array driven by vertical current injection. In order to improve the conductivity of the structure while also preventing current leakage, we introduce the oblique deposition of electrodes on a photonic crystal pattern by using an electron beam evaporation apparatus. The performance of an electrode is investigated by a transmission line method, and the CirD structure is fabricated with the electrode. We analyze the voltage-current relationship and confirm the CirD structure’s low resistance of under 1 kΩ.
topic optical communications
photonic crystal laser
electron beam evaporation
url https://www.mdpi.com/2076-3417/10/23/8377
work_keys_str_mv AT hanqiaoye obliquedepositionoftiptauelectrodeonphotoniccrystalforverticalcurrentinjection
AT ryotasaeki obliquedepositionoftiptauelectrodeonphotoniccrystalforverticalcurrentinjection
AT yifanxiong obliquedepositionoftiptauelectrodeonphotoniccrystalforverticalcurrentinjection
AT takashikogure obliquedepositionoftiptauelectrodeonphotoniccrystalforverticalcurrentinjection
AT masatomorifuji obliquedepositionoftiptauelectrodeonphotoniccrystalforverticalcurrentinjection
AT hirotakekajii obliquedepositionoftiptauelectrodeonphotoniccrystalforverticalcurrentinjection
AT akihiromaruta obliquedepositionoftiptauelectrodeonphotoniccrystalforverticalcurrentinjection
AT masahikokondow obliquedepositionoftiptauelectrodeonphotoniccrystalforverticalcurrentinjection
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