Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment

In the present study Ar+ cluster ions accelerated by voltages in the range of 5–10 kV are used to irradiate single crystal ZnO substrates and nanorods to fabricate self-assembled surface nanoripple arrays. The ripple formation is observed when the incidence angle of the cluster beam is in the range...

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Main Authors:	Xiaomei Zeng, Vasiliy Pelenovich, Bin Xing, Rakhim Rakhimov, Wenbin Zuo, Alexander Tolstogouzov, Chuansheng Liu, Dejun Fu, Xiangheng Xiao
Format:	Article
Language:	English
Published:	Beilstein-Institut 2020-02-01
Series:	Beilstein Journal of Nanotechnology
Subjects:	cluster ion bombardment gas cluster ion beam surface ripples zno nanorods
Online Access:	https://doi.org/10.3762/bjnano.11.29

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spelling	doaj-8144d50c10a54da984515387a20376b22021-05-03T08:10:10ZengBeilstein-InstitutBeilstein Journal of Nanotechnology2190-42862020-02-0111138339010.3762/bjnano.11.292190-4286-11-29Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardmentXiaomei Zeng0Vasiliy Pelenovich1Bin Xing2Rakhim Rakhimov3Wenbin Zuo4Alexander Tolstogouzov5Chuansheng Liu6Dejun Fu7Xiangheng Xiao8Department of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, ChinaSchool of Power & Mechanical Engineering, Wuhan University, Wuhan 430072, ChinaSchool of Power & Mechanical Engineering, Wuhan University, Wuhan 430072, ChinaDepartment of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, ChinaDepartment of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, ChinaDepartment of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, ChinaShenzhen Institute of Wuhan UniversityDepartment of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, ChinaDepartment of Physics and Key Laboratory of Artificial Micro- and Nano-structures of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory and Center for Ion Beam Application, School of Physics and Technology, Wuhan University, Wuhan 430072, ChinaIn the present study Ar+ cluster ions accelerated by voltages in the range of 5–10 kV are used to irradiate single crystal ZnO substrates and nanorods to fabricate self-assembled surface nanoripple arrays. The ripple formation is observed when the incidence angle of the cluster beam is in the range of 30–70°. The influence of incidence angle, accelerating voltage, and fluence on the ripple formation is studied. Wavelength and height of the nanoripples increase with increasing accelerating voltage and fluence for both targets. The nanoripples formed on the flat substrates remind of aeolian sand ripples. The ripples formed at high ion fluences on the nanorod facets resemble well-ordered parallel steps or ribs. The more ordered ripple formation on nanorods can be associated with the confinement of the nanorod facets in comparison with the quasi-infinite surface of the flat substrates.https://doi.org/10.3762/bjnano.11.29cluster ion bombardmentgas cluster ion beamsurface rippleszno nanorods
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Xiaomei Zeng Vasiliy Pelenovich Bin Xing Rakhim Rakhimov Wenbin Zuo Alexander Tolstogouzov Chuansheng Liu Dejun Fu Xiangheng Xiao
spellingShingle	Xiaomei Zeng Vasiliy Pelenovich Bin Xing Rakhim Rakhimov Wenbin Zuo Alexander Tolstogouzov Chuansheng Liu Dejun Fu Xiangheng Xiao Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment Beilstein Journal of Nanotechnology cluster ion bombardment gas cluster ion beam surface ripples zno nanorods
author_facet	Xiaomei Zeng Vasiliy Pelenovich Bin Xing Rakhim Rakhimov Wenbin Zuo Alexander Tolstogouzov Chuansheng Liu Dejun Fu Xiangheng Xiao
author_sort	Xiaomei Zeng
title	Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment
title_short	Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment
title_full	Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment
title_fullStr	Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment
title_full_unstemmed	Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment
title_sort	formation of nanoripples on zno flat substrates and nanorods by gas cluster ion bombardment
publisher	Beilstein-Institut
series	Beilstein Journal of Nanotechnology
issn	2190-4286
publishDate	2020-02-01
description	In the present study Ar+ cluster ions accelerated by voltages in the range of 5–10 kV are used to irradiate single crystal ZnO substrates and nanorods to fabricate self-assembled surface nanoripple arrays. The ripple formation is observed when the incidence angle of the cluster beam is in the range of 30–70°. The influence of incidence angle, accelerating voltage, and fluence on the ripple formation is studied. Wavelength and height of the nanoripples increase with increasing accelerating voltage and fluence for both targets. The nanoripples formed on the flat substrates remind of aeolian sand ripples. The ripples formed at high ion fluences on the nanorod facets resemble well-ordered parallel steps or ribs. The more ordered ripple formation on nanorods can be associated with the confinement of the nanorod facets in comparison with the quasi-infinite surface of the flat substrates.
topic	cluster ion bombardment gas cluster ion beam surface ripples zno nanorods
url	https://doi.org/10.3762/bjnano.11.29
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Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment

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