MICROSTRUCTURING OF SILICON SINGLE CRYSTALS BY FIBER LASER IN HIGH-SPEED SCANNING MODE

MICROSTRUCTURING OF SILICON SINGLE CRYSTALS BY FIBER LASER IN HIGH-SPEED SCANNING MODE

Subject of Study. The surface structure of the silicon wafers (substrate) with a thermally grown silicon dioxide on the surface (of SiO2/Si) is studied after irradiation by pulse fiber laser of ILI-1-20 type. The main requirements for exposure modes of the system are: the preservation of the integri...

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Bibliographic Details
Main Authors: T. A. Trifonova, C. T. Huynh
Format: Article
Language:English
Published: Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University) 2015-11-01
Series:Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
Subjects:
laser irradiation
scanning
microstructuring
surface reconstruction
superlattice
single-crystal silicon
silicon dioxide
SiO2/Si system
microstructure
Online Access:http://ntv.ifmo.ru/file/article/14094.pdf

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http://ntv.ifmo.ru/file/article/14094.pdf

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