Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

This paper presents an in-plane sandwich nano-g microelectromechanical systems (MEMS) accelerometer. The proof-mass fabrication is based on silicon etching through technology using inductive coupled plasma (ICP) etching. The capacitive detection system, which employs the area-changing sensing method...

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Bibliographic Details
Main Authors:	Zhu Li, Wen Jie Wu, Pan Pan Zheng, Jin Quan Liu, Ji Fan, Liang Cheng Tu
Format:	Article
Language:	English
Published:	MDPI AG 2016-09-01
Series:	Micromachines
Subjects:	MEMS three dimensional (3D) capacitive sensing system design large dynamic range high resolution high-precision measurement
Online Access:	http://www.mdpi.com/2072-666X/7/9/167

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