Si‐core/SiGe‐shell channel nanowire FET for sub‐10‐nm logic technology in the THz regime

The p‐type nanowire field‐effect transistor (FET) with a SiGe shell channel on a Si core is optimally designed and characterized using in‐depth technology computer‐aided design (TCAD) with quantum models for sub‐10‐nm advanced logic technology. SiGe is adopted as the material for the ultrathin shell...

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Main Authors: Eunseon Yu, Baegmo Son, Byungmin Kam, Yong Sang Joh, Sangjoon Park, Won‐Jun Lee, Jongwan Jung, Seongjae Cho
Format: Article
Language:English
Published: Electronics and Telecommunications Research Institute (ETRI) 2019-10-01
Series:ETRI Journal
Subjects:
Online Access:https://doi.org/10.4218/etrij.2018-0281
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spelling doaj-805c2fc8530d4402b99abdd3f57d621a2020-11-25T02:24:28ZengElectronics and Telecommunications Research Institute (ETRI)ETRI Journal1225-64632019-10-0141682983710.4218/etrij.2018-028110.4218/etrij.2018-0281Si‐core/SiGe‐shell channel nanowire FET for sub‐10‐nm logic technology in the THz regimeEunseon YuBaegmo SonByungmin KamYong Sang JohSangjoon ParkWon‐Jun LeeJongwan JungSeongjae ChoThe p‐type nanowire field‐effect transistor (FET) with a SiGe shell channel on a Si core is optimally designed and characterized using in‐depth technology computer‐aided design (TCAD) with quantum models for sub‐10‐nm advanced logic technology. SiGe is adopted as the material for the ultrathin shell channel owing to its two primary merits of high hole mobility and strong Si compatibility. The SiGe shell can effectively confine the hole because of the large valence‐band offset (VBO) between the Si core and the SiGe channel arranged in the radial direction. The proposed device is optimized in terms of the Ge shell channel thickness, Ge fraction in the SiGe channel, and the channel length (Lg) by examining a set of primary DC and AC parameters. The cutoff frequency (fT) and maximum oscillation frequency (fmax) of the proposed device were determined to be 440.0 and 753.9 GHz when Lg is 5 nm, respectively, with an intrinsic delay time (τ) of 3.14 ps. The proposed SiGe‐shell channel p‐type nanowire FET has demonstrated a strong potential for low‐power and high‐speed applications in 10‐nm‐and‐beyond complementary metal‐oxide‐semiconductor (CMOS) technology.https://doi.org/10.4218/etrij.2018-0281cmos technologyhigh hole mobilitylow‐power high‐speed operationnanowire fetsige shell channelsub‐10‐nm logic technologyvalence‐band offset
collection DOAJ
language English
format Article
sources DOAJ
author Eunseon Yu
Baegmo Son
Byungmin Kam
Yong Sang Joh
Sangjoon Park
Won‐Jun Lee
Jongwan Jung
Seongjae Cho
spellingShingle Eunseon Yu
Baegmo Son
Byungmin Kam
Yong Sang Joh
Sangjoon Park
Won‐Jun Lee
Jongwan Jung
Seongjae Cho
Si‐core/SiGe‐shell channel nanowire FET for sub‐10‐nm logic technology in the THz regime
ETRI Journal
cmos technology
high hole mobility
low‐power high‐speed operation
nanowire fet
sige shell channel
sub‐10‐nm logic technology
valence‐band offset
author_facet Eunseon Yu
Baegmo Son
Byungmin Kam
Yong Sang Joh
Sangjoon Park
Won‐Jun Lee
Jongwan Jung
Seongjae Cho
author_sort Eunseon Yu
title Si‐core/SiGe‐shell channel nanowire FET for sub‐10‐nm logic technology in the THz regime
title_short Si‐core/SiGe‐shell channel nanowire FET for sub‐10‐nm logic technology in the THz regime
title_full Si‐core/SiGe‐shell channel nanowire FET for sub‐10‐nm logic technology in the THz regime
title_fullStr Si‐core/SiGe‐shell channel nanowire FET for sub‐10‐nm logic technology in the THz regime
title_full_unstemmed Si‐core/SiGe‐shell channel nanowire FET for sub‐10‐nm logic technology in the THz regime
title_sort si‐core/sige‐shell channel nanowire fet for sub‐10‐nm logic technology in the thz regime
publisher Electronics and Telecommunications Research Institute (ETRI)
series ETRI Journal
issn 1225-6463
publishDate 2019-10-01
description The p‐type nanowire field‐effect transistor (FET) with a SiGe shell channel on a Si core is optimally designed and characterized using in‐depth technology computer‐aided design (TCAD) with quantum models for sub‐10‐nm advanced logic technology. SiGe is adopted as the material for the ultrathin shell channel owing to its two primary merits of high hole mobility and strong Si compatibility. The SiGe shell can effectively confine the hole because of the large valence‐band offset (VBO) between the Si core and the SiGe channel arranged in the radial direction. The proposed device is optimized in terms of the Ge shell channel thickness, Ge fraction in the SiGe channel, and the channel length (Lg) by examining a set of primary DC and AC parameters. The cutoff frequency (fT) and maximum oscillation frequency (fmax) of the proposed device were determined to be 440.0 and 753.9 GHz when Lg is 5 nm, respectively, with an intrinsic delay time (τ) of 3.14 ps. The proposed SiGe‐shell channel p‐type nanowire FET has demonstrated a strong potential for low‐power and high‐speed applications in 10‐nm‐and‐beyond complementary metal‐oxide‐semiconductor (CMOS) technology.
topic cmos technology
high hole mobility
low‐power high‐speed operation
nanowire fet
sige shell channel
sub‐10‐nm logic technology
valence‐band offset
url https://doi.org/10.4218/etrij.2018-0281
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