An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions
In this paper, an ISFET sensor based on In2O3 nanoribbon is developed for pH detection of micro solutions. A double channel ISFET is designed which includes the In2O3 nanoribbon top channel and silicon substrate bottom channel so as to realize the pH detection of the micro solutions. Through experim...
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EDP Sciences
2020-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://www.matec-conferences.org/articles/matecconf/pdf/2020/23/matecconf_icmie2020_01004.pdf |
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doaj-7ff8bb326ba242878f2113321c4833d62021-08-05T13:52:25ZengEDP SciencesMATEC Web of Conferences2261-236X2020-01-013270100410.1051/matecconf/202032701004matecconf_icmie2020_01004An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutionsWu Chuanjian0Wang Yiqing1Yang Min2College of Electrical Engineering and Control Science, Nanjing Tech UniversityCollege of Electrical Engineering and Control Science, Nanjing Tech UniversityCollege of Electrical Engineering and Control Science, Nanjing Tech UniversityIn this paper, an ISFET sensor based on In2O3 nanoribbon is developed for pH detection of micro solutions. A double channel ISFET is designed which includes the In2O3 nanoribbon top channel and silicon substrate bottom channel so as to realize the pH detection of the micro solutions. Through experiments, the sensitivity of the sensor is 70 mV/pH in the range of pH 6 to pH 10, which exceeds the Nernst limit of 59.2 mV/pH (300 K) at room temperature. Taking the detection of cTnI as an example, the pH sensor can be used to detect the concentration of biomarkershttps://www.matec-conferences.org/articles/matecconf/pdf/2020/23/matecconf_icmie2020_01004.pdf |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Wu Chuanjian Wang Yiqing Yang Min |
| spellingShingle |
Wu Chuanjian Wang Yiqing Yang Min An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions MATEC Web of Conferences |
| author_facet |
Wu Chuanjian Wang Yiqing Yang Min |
| author_sort |
Wu Chuanjian |
| title |
An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions |
| title_short |
An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions |
| title_full |
An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions |
| title_fullStr |
An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions |
| title_full_unstemmed |
An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions |
| title_sort |
isfet sensor based on in2o3 nanoribbon for ph detection of micro solutions |
| publisher |
EDP Sciences |
| series |
MATEC Web of Conferences |
| issn |
2261-236X |
| publishDate |
2020-01-01 |
| description |
In this paper, an ISFET sensor based on In2O3 nanoribbon is developed for pH detection of micro solutions. A double channel ISFET is designed which includes the In2O3 nanoribbon top channel and silicon substrate bottom channel so as to realize the pH detection of the micro solutions. Through experiments, the sensitivity of the sensor is 70 mV/pH in the range of pH 6 to pH 10, which exceeds the Nernst limit of 59.2 mV/pH (300 K) at room temperature. Taking the detection of cTnI as an example, the pH sensor can be used to detect the concentration of biomarkers |
| url |
https://www.matec-conferences.org/articles/matecconf/pdf/2020/23/matecconf_icmie2020_01004.pdf |
| work_keys_str_mv |
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1721220505121325056 |