An ISFET sensor based on In2O3 nanoribbon for pH detection of micro solutions
In this paper, an ISFET sensor based on In2O3 nanoribbon is developed for pH detection of micro solutions. A double channel ISFET is designed which includes the In2O3 nanoribbon top channel and silicon substrate bottom channel so as to realize the pH detection of the micro solutions. Through experim...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2020-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://www.matec-conferences.org/articles/matecconf/pdf/2020/23/matecconf_icmie2020_01004.pdf |
| Summary: | In this paper, an ISFET sensor based on In2O3 nanoribbon is developed for pH detection of micro solutions. A double channel ISFET is designed which includes the In2O3 nanoribbon top channel and silicon substrate bottom channel so as to realize the pH detection of the micro solutions. Through experiments, the sensitivity of the sensor is 70 mV/pH in the range of pH 6 to pH 10, which exceeds the Nernst limit of 59.2 mV/pH (300 K) at room temperature. Taking the detection of cTnI as an example, the pH sensor can be used to detect the concentration of biomarkers |
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| ISSN: | 2261-236X |