Influence of Substrate Stage Temperature and Rotation Rate on the Magneto-Optical Quality of RF-Sputtered Bi2.1Dy0.9Fe3.9Ga1.1O12 Garnet Thin Films
Highly bismuth-substituted iron garnet thin films are prepared on quartz substrates by using a radio frequency (RF) magnetron sputtering technique. We study the factors (process parameters associated with the RF magnetron sputter deposition technique) affecting the magneto-optical (MO) properties of...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-03-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | http://www.mdpi.com/2076-3417/8/3/456 |