The Influence of Preparation Conditions on the Structural Properties and Hardness of Diamond-Like Carbon Films, Prepared by Plasma Source Ion Implantation
Diamond-like carbon (DLC) films were prepared from a hydrocarbon precursor gas by plasma source ion implantation (PSII), in which the plasma generation and the film deposition were coupled; i.e., the plasma was generated by the applied voltage and no additional plasma source was used. Several experi...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-04-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/10/4/360 |