Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films

Properties of Nickel Films Prepared by R.F. Sputtering and Interdiffusion Analysis of Ta2N–Ni Films

Bibliographic Details
Main Authors:	G. Morillot, A. Huber, S. Abdin, C. Val
Format:	Article
Language:	English
Published:	Hindawi Limited 1980-01-01
Series:	Active and Passive Electronic Components
Online Access:	http://dx.doi.org/10.1155/APEC.7.159

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