Sputtered PdO Decorated TiO2 Sensing Layer for a Hydrogen Gas Sensor

We report a sputtered PdO decorated TiO2 sensing layer by radiofrequency (RF) sputtering methods and demonstrated gas sensing performance for H2 gas. We prepared sputtered anatase TiO2 sensing films with 200 nm thickness and deposited a Pd layer on top of the TiO2 films with a thickness ranging from...

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Bibliographic Details
Main Authors: Jeong Hoon Lee, Seungmin Kwak, Jin-Hyung Lee, Inho Kim, Yong Kyoung Yoo, Tae Hoon Lee, Young-Seok Shim, Jinseok Kim, Kyu Hyoung Lee
Format: Article
Language:English
Published: Hindawi Limited 2018-01-01
Series:Journal of Nanomaterials
Online Access:http://dx.doi.org/10.1155/2018/8678519

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