Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm

Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm

A new approach for the realization of depth reference samples is presented. By a combination of photolithography, reactive ion beam etching, surface planarization with photoresists and a subsequent coating with non-transparent materials, defined sinusoidal surface profiles are generated which can be...

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Main Authors: Finzel Annemarie, Dornberg Gregor, Görsch Stephan, Mitzschke Martin, Bauer Jens, Frost Frank
Format: Article
Language:English
Published: EDP Sciences 2019-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2019/20/epjconf_eos18_03004.pdf
id doaj-7db70331621f447dbf7b48479fb0c063
record_format Article
spelling doaj-7db70331621f447dbf7b48479fb0c0632021-08-02T08:45:14ZengEDP SciencesEPJ Web of Conferences2100-014X2019-01-012150300410.1051/epjconf/201921503004epjconf_eos18_03004Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nmFinzel AnnemarieDornberg GregorGörsch StephanMitzschke MartinBauer JensFrost FrankA new approach for the realization of depth reference samples is presented. By a combination of photolithography, reactive ion beam etching, surface planarization with photoresists and a subsequent coating with non-transparent materials, defined sinusoidal surface profiles are generated which can be used as depth references for the comparison and calibration of different surface profile measurements. The smallest realized surface amplitudes are in the range of less than 0.1 nm.https://www.epj-conferences.org/articles/epjconf/pdf/2019/20/epjconf_eos18_03004.pdf
collection DOAJ
language English
format Article
sources DOAJ
author Finzel Annemarie
Dornberg Gregor
Görsch Stephan
Mitzschke Martin
Bauer Jens
Frost Frank
spellingShingle Finzel Annemarie
Dornberg Gregor
Görsch Stephan
Mitzschke Martin
Bauer Jens
Frost Frank
Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
EPJ Web of Conferences
author_facet Finzel Annemarie
Dornberg Gregor
Görsch Stephan
Mitzschke Martin
Bauer Jens
Frost Frank
author_sort Finzel Annemarie
title Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
title_short Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
title_full Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
title_fullStr Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
title_full_unstemmed Realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
title_sort realization of depth reference samples with surfaces amplitudes between 0.1 nm and 5 nm
publisher EDP Sciences
series EPJ Web of Conferences
issn 2100-014X
publishDate 2019-01-01
description A new approach for the realization of depth reference samples is presented. By a combination of photolithography, reactive ion beam etching, surface planarization with photoresists and a subsequent coating with non-transparent materials, defined sinusoidal surface profiles are generated which can be used as depth references for the comparison and calibration of different surface profile measurements. The smallest realized surface amplitudes are in the range of less than 0.1 nm.
url https://www.epj-conferences.org/articles/epjconf/pdf/2019/20/epjconf_eos18_03004.pdf
work_keys_str_mv AT finzelannemarie realizationofdepthreferencesampleswithsurfacesamplitudesbetween01nmand5nm
AT dornberggregor realizationofdepthreferencesampleswithsurfacesamplitudesbetween01nmand5nm
AT gorschstephan realizationofdepthreferencesampleswithsurfacesamplitudesbetween01nmand5nm
AT mitzschkemartin realizationofdepthreferencesampleswithsurfacesamplitudesbetween01nmand5nm
AT bauerjens realizationofdepthreferencesampleswithsurfacesamplitudesbetween01nmand5nm
AT frostfrank realizationofdepthreferencesampleswithsurfacesamplitudesbetween01nmand5nm
_version_ 1721237280215007232

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