Fabrication of compliant mechanisms on the mesoscale
The fabrication of compliant mechanisms on the mesoscale requires collaboration of mechanical engineering design, with materials science and engineering fabrication approaches. In this paper, a review of current fabrication approaches to produce mesoscale devices is given, highlighting the benefits...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2011-06-01
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| Series: | Mechanical Sciences |
| Online Access: | http://www.mech-sci.net/2/129/2011/ms-2-129-2011.pdf |