Highly elastic conductive polymeric MEMS
Polymeric structures with integrated, functional microelectrical mechanical systems (MEMS) elements are increasingly important in various applications such as biomedical systems or wearable smart devices. These applications require highly flexible and elastic polymers with good conductivity, which c...
Main Authors: | J Ruhhammer, M Zens, F Goldschmidtboeing, A Seifert, P Woias |
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Format: | Article |
Language: | English |
Published: |
Taylor & Francis Group
2015-02-01
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Series: | Science and Technology of Advanced Materials |
Subjects: | |
Online Access: | http://dx.doi.org/10.1088/1468-6996/16/1/015003 |
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