Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions

Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions

In this paper, a stable numerical approach for recovering the membrane profile of a 2D Micro-Electric-Mechanical-Systems (MEMS) is presented. Starting from a well-known 2D nonlinear second-order differential model for electrostatic circular membrane MEMS, where the amplitude of the electrostatic fie...

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Bibliographic Details
Main Authors: Mario Versaci, Giovanni Angiulli, Alessandra Jannelli
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Mathematics
Subjects:
electrostatic membrane MEMS devices
2D nonlinear second order differential model
mean curvature
Lobatto’s scheme
ghost solutions
Online Access:https://www.mdpi.com/2227-7390/8/4/487
Description
Summary:In this paper, a stable numerical approach for recovering the membrane profile of a 2D Micro-Electric-Mechanical-Systems (MEMS) is presented. Starting from a well-known 2D nonlinear second-order differential model for electrostatic circular membrane MEMS, where the amplitude of the electrostatic field is considered proportional to the mean curvature of the membrane, a collocation procedure, based on the three-stage Lobatto formula, is derived. The convergence is studied, thus obtaining the parameters operative ranges determining the areas of applicability of the device under analysis.
ISSN:2227-7390

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