Influence of Deposition Pressure on Component Composition and Properties of Barium Strontium Titanate Thin Films
Influence of deposition pressure on the properties of ferroelectric barium strontium titanate thin films obtained by RF magnetron sputtering has been investigated. It has been shown that the deposition pressure affects the component composition of the films as the spatial zone of atomic particle the...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Saint Petersburg Electrotechnical University "LETI"
2016-12-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
| Subjects: | |
| Online Access: | https://re.eltech.ru/jour/article/view/147 |