Estimating electron temperature and density using improved collisional-radiative model in high-density RF argon plasma

It is crucial to measure the electron density (ne) and temperature (Te) for applications such as developing small helicon sources in plasma thrusters. Hence, this study developed a method based on an optical emission spectroscopic (OES) measurement without disturbance or contamination for helicon pl...

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Bibliographic Details
Main Authors: H. Horita, D. Kuwahara, H. Akatsuka, S. Shinohara
Format: Article
Language:English
Published: AIP Publishing LLC 2021-07-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0050215