Flow characteristics and velocity fields of a front opening unified pod at open door condition
Particle contamination decreases product quality in semiconductor industries. Nowadays, the size of the chips and features has significantly reduced; thus increasing the importance of moisture removal from front opening unified pods during manufacturing and transportation of semiconductor wafers. An...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-10-01
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| Series: | Case Studies in Thermal Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214157X19303491 |