Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force Microscopy

Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force Microscopy

<p>Abstract</p> <p>Ultrasonic force microscopy has been applied to the characterization of titanium nitride coatings deposited by physical vapor deposition dc magnetron sputtering on stainless steel substrates. The titanium nitride layers exhibit a rich variety of elastic contrast...

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Bibliographic Details
Main Authors: Cuberes MT, Hidalgo JA, Montero-Ocampo C
Format: Article
Language:English
Published: SpringerOpen 2009-01-01
Series:Nanoscale Research Letters
Subjects:
PVD nanostructured coatings
TiN
Ultrasonic force microscopy
Scanning probe microscopy
Nanomechanics
Online Access:http://dx.doi.org/10.1007/s11671-009-9426-3

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