Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry
This paper applied a radial basis function network (RBFN) in coherent Fourier scatterometry (CFS) to reconstruct the linewidth of periodic line/space (L/S) patterns. The fast, nondestructive, and repeatable measurement capability of CFS enables its integration with intelligent lithography systems. T...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7588079/ |