Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry

Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry

This paper applied a radial basis function network (RBFN) in coherent Fourier scatterometry (CFS) to reconstruct the linewidth of periodic line/space (L/S) patterns. The fast, nondestructive, and repeatable measurement capability of CFS enables its integration with intelligent lithography systems. T...

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Bibliographic Details
Main Authors: Hung-Fei Kuo, Muhamad Faisal, Shun-Feng Su
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Access
Subjects:
Coherent Fourier scatterometry (CFS)
critical dimension (CD) reconstruction
holistic lithography
optical scatterometry
radial basis function network (RBFN)
Online Access:https://ieeexplore.ieee.org/document/7588079/

Internet

https://ieeexplore.ieee.org/document/7588079/

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