Novel Design of an Extremely Miniaturized Accelerometer Based on Quantum Tunneling Effect

Novel Design of an Extremely Miniaturized Accelerometer Based on Quantum Tunneling Effect

This paper presents the design of an extremely miniaturized accelerometer based on the tunneling effect. Because of its high sensitivity the tunneling effect allows the detection of smallest deflections. The aim of the novel design is a large geometric miniaturization at the lowest possible natural...

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Bibliographic Details
Main Authors:	Michael Haub, Sebastian Hummel, Martin Bogner, Hermann Sandmaier
Format:	Article
Language:	English
Published:	MDPI AG 2018-11-01
Series:	Proceedings
Subjects:	accelerometer tunneling effect microsensors electrostatic focused ion beam
Online Access:	https://www.mdpi.com/2504-3900/2/13/1045

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