Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators
Resonant micro- and nanoelectromechanical systems (MEMS/NEMS) are typically subject to interaction with a liquid or gaseous environment. Recently, it has been demonstrated that non-conventional eigenmodes exhibit remarkably high quality factors (Q factors) in liquids. However, the physical origin of...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/896 |