Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators

• Main Authors: Daniel Platz, Georg Pfusterschmied, Ulrich Schmid
• Format: Article
• Language: English
• Published: MDPI AG 2018-11-01
• Series: Proceedings
• Subjects: MEMS; NEMS; fluid sensing; fluid-structure interaction; stokes flow; boundary integral method; damping; quality factor
• Online Access: https://www.mdpi.com/2504-3900/2/13/896

Resonant micro- and nanoelectromechanical systems (MEMS/NEMS) are typically subject to interaction with a liquid or gaseous environment. Recently, it has been demonstrated that non-conventional eigenmodes exhibit remarkably high quality factors (Q factors) in liquids. However, the physical origin of this phenomenon remains elusive. Here we introduce a definition of non-conventional eigenmodes for cantilever structures and develop a boundary integral method for describing the interaction of an incompressible viscous fluid and a non-conventional eigenmode of a MEMS/NEMS resonator. With this framework we are able to study the influence of the mode shape on the fluid-structure interaction.