Finite Element Analysis of Static and Dynamic Pull-In Instability of a Fixed-Fixed Micro Beam Considering Damping Effects

Finite Element Analysis of Static and Dynamic Pull-In Instability of a Fixed-Fixed Micro Beam Considering Damping Effects

In this paper the static and dynamic pull-in phenomenon of a fixed-fixed micro beam, considering the effects of residual stress, axial stress, damping coefficient, and Fringing field effects have statically and dynamically been analyzed. The nonlinear electromechanical coupled integro- differential...

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Bibliographic Details
Main Authors: Ghader Rezazadeh, Saber Azizi, Mohammad Reza Ghazavi
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2009-04-01
Series:Sensors & Transducers
Subjects:
Pull-in instability
Damping coefficient
Residual stress
Axial stress
MEMS
Electrostatic actuation
Pull-in time
Online Access:http://www.sensorsportal.com/HTML/DIGEST/april_09/P_420.pdf

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