Deposition and characterization of amorphous carbon thin film

The amorphous carbon thin films of 500 nm thickness was deposited on Si (100) and stainless steel (SS) substrates by filtered cathodic vacuum arc (FCVA) technique. The 100 nm chromium interlayer was deposited by R.F. magnetron sputtering system to improve the adhesion strength between the substrate...

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Main Authors:	R. Venkatesh Babu, G. Balakrishnan, R. Shivaraman, S. Manavalan, J. I. Song
Format:	Article
Language:	English
Published:	Applied Science Innovations Private Limited 2016-12-01
Series:	Carbon: Science and Technology
Subjects:	Diamond like carbon thin films filtered cathodic vacuum arc Raman spectroscopy atomic force microscopy scratch test
Online Access:	http://www.applied-science-innovations.com/cst-web-site/CST-8-4-2016/CST-224-8-4-2016-43-47.pdf

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spelling	doaj-738143c37e854ca784fa00382bdd2d902020-11-24T22:04:18ZengApplied Science Innovations Private LimitedCarbon: Science and Technology0974-05460974-05462016-12-01844347Deposition and characterization of amorphous carbon thin filmR. Venkatesh Babu0G. Balakrishnan1 R. Shivaraman2 S. Manavalan3J. I. Song4Department of Mechanical Engineering, Bharath Institute of Science and Technology, Bharath University, Chennai-600073, India. Department of Nanotechnology, Centre of Excellence in Patterned Multiferroics & Nanotechnology, Bharath Institute of Science and Technology, Bharath University, Chennai-600073, India. Department of Nanotechnology, Centre of Excellence in Patterned Multiferroics & Nanotechnology, Bharath Institute of Science and Technology, Bharath University, Chennai-600073, India. Department of Mechanical Engineering, Bharath Institute of Science and Technology, Bharath University, Chennai-600073, India. Department of Mechanical Engineering, Changwon National University, Changwon- 641773, South Korea. The amorphous carbon thin films of 500 nm thickness was deposited on Si (100) and stainless steel (SS) substrates by filtered cathodic vacuum arc (FCVA) technique. The 100 nm chromium interlayer was deposited by R.F. magnetron sputtering system to improve the adhesion strength between the substrate and the film. The Raman study showed the broad peak ~1560 cm-1 indicating the amorphous carbon. The AFM studies revealed the smooth morphology of the films with small surface roughness. The wear studies indicated the low friction coefficient of ~0.14. The carbon films prepared on stainless steel indicated the upper critical load of 11 N and the hardness value of 27 GPa a with the young’s modulus of 240 GPa.http://www.applied-science-innovations.com/cst-web-site/CST-8-4-2016/CST-224-8-4-2016-43-47.pdfDiamond like carbon thin filmsfiltered cathodic vacuum arcRaman spectroscopyatomic force microscopyscratch test
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	R. Venkatesh Babu G. Balakrishnan R. Shivaraman S. Manavalan J. I. Song
spellingShingle	R. Venkatesh Babu G. Balakrishnan R. Shivaraman S. Manavalan J. I. Song Deposition and characterization of amorphous carbon thin film Carbon: Science and Technology Diamond like carbon thin films filtered cathodic vacuum arc Raman spectroscopy atomic force microscopy scratch test
author_facet	R. Venkatesh Babu G. Balakrishnan R. Shivaraman S. Manavalan J. I. Song
author_sort	R. Venkatesh Babu
title	Deposition and characterization of amorphous carbon thin film
title_short	Deposition and characterization of amorphous carbon thin film
title_full	Deposition and characterization of amorphous carbon thin film
title_fullStr	Deposition and characterization of amorphous carbon thin film
title_full_unstemmed	Deposition and characterization of amorphous carbon thin film
title_sort	deposition and characterization of amorphous carbon thin film
publisher	Applied Science Innovations Private Limited
series	Carbon: Science and Technology
issn	0974-0546 0974-0546
publishDate	2016-12-01
description	The amorphous carbon thin films of 500 nm thickness was deposited on Si (100) and stainless steel (SS) substrates by filtered cathodic vacuum arc (FCVA) technique. The 100 nm chromium interlayer was deposited by R.F. magnetron sputtering system to improve the adhesion strength between the substrate and the film. The Raman study showed the broad peak ~1560 cm-1 indicating the amorphous carbon. The AFM studies revealed the smooth morphology of the films with small surface roughness. The wear studies indicated the low friction coefficient of ~0.14. The carbon films prepared on stainless steel indicated the upper critical load of 11 N and the hardness value of 27 GPa a with the young’s modulus of 240 GPa.
topic	Diamond like carbon thin films filtered cathodic vacuum arc Raman spectroscopy atomic force microscopy scratch test
url	http://www.applied-science-innovations.com/cst-web-site/CST-8-4-2016/CST-224-8-4-2016-43-47.pdf
work_keys_str_mv	AT rvenkateshbabu depositionandcharacterizationofamorphouscarbonthinfilm AT gbalakrishnan depositionandcharacterizationofamorphouscarbonthinfilm AT rshivaraman depositionandcharacterizationofamorphouscarbonthinfilm AT smanavalan depositionandcharacterizationofamorphouscarbonthinfilm AT jisong depositionandcharacterizationofamorphouscarbonthinfilm
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Deposition and characterization of amorphous carbon thin film

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