Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption

• Main Authors: Erik Hagen Waller, Georg von Freymann
• Format: Article
• Language: English
• Published: MDPI AG 2016-08-01
• Series: Polymers
• Subjects: 3D μ-printing; direct-laser-writing; photo resist; polymerization
• Online Access: http://www.mdpi.com/2073-4360/8/8/297

One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect.