Improving the Design of Capacitive Micromachined Ultrasonic Transducers Aided with Sensitivity Analysis
The paper presents the results of analysis performed to search for feasible design improvements for capacitive micromachined ultrasonic transducer. Carried out search has been aided with the sensitivity analysis and the application of Response Surface Method. The multiphysics approach has been taken...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Multi-Science Publishing
2016-09-01
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| Series: | International Journal of Multiphysics |
| Online Access: | http://journal.multiphysics.org/index.php/IJM/article/view/173 |