Controlling the electrical properties of ZnO films by forming zinc and oxide bridges by a plasma and electron-assisted process
A new method to produce electrically steady ZnO films without any heating process has been developed by using plasma and electron beams to facilitate bonding between the metallic component and the oxygen on coated ZnO films. Both plasma atmosphere and electron beams can function as sources of nonequ...
Main Authors: | Norihiro Shimoi, Takamitsu Harada, Yasumitsu Tanaka, Shun-ichiro Tanaka |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2012-06-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.4732315 |
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