Studying of a Tunneling Accelerometer with Piezoelectric Actuation and Fuzzy Controller
This report demonstrates the design of closed-loop micro accelerometer sensor. Proposed sensor consists of a polysilicon cantilever micro beam as a proof mass and uses the extreme sensitivity of electron tunneling to variations in electrode separation as sensing element of the sensor. The model uses...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2008-03-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/march_08/P_244.pdf |