Effects of Al and N2 Flow Sequences on the Interface Formation of AlN on Sapphire by EVPE

Effects of Al and N2 Flow Sequences on the Interface Formation of AlN on Sapphire by EVPE

The interface formation mechanisms of AlN films on sapphire substrates grown by the elementary source vapor phase epitaxy (EVPE) method, which is a new AlN bulk fabrication method using Al and N2 as precursors, are investigated. Supplying N2 after the substrate temperature reaches the growth tempera...

Full description

Bibliographic Details
Main Authors:	Katsuhiro Kishimoto, Mitsuru Funato, Yoichi Kawakami
Format:	Article
Language:	English
Published:	MDPI AG 2017-04-01
Series:	Crystals
Subjects:	AlN EVPE self-separation void
Online Access:	http://www.mdpi.com/2073-4352/7/5/123

Similar Items

MOVPE Growth of AlN and AlGaN/AlN Quantum Wells and their Optical Polarization Properties
by: BANAL, RYAN GANIPAN
Published: (2009)

Thermodynamical consideration of the synthesis of solid AlN from thermal plasma
by: NIKOLA PEKAS, et al.
Published: (2001-08-01)

Epitaxial Growth of GaN on Magnetron Sputtered AlN/Hexagonal BN/Sapphire Substrates
by: Jinxing Wu, et al.
Published: (2020-11-01)

MORPHOLOGY AND OPTICAL PROPERTIES OF AlN FILMS ON SAPPHIRE
by: Oleg V. Devitsky, et al.
Published: (2019-12-01)

Efficient and cost-effective method to synthesize highly purified Ti4AlN3 and Ti2AlN
by: Muhammad Faraz Ud Din, et al.
Published: (2019-02-01)

Epitaxial Growth of AlN on (0001) Sapphire: Assessment of HVPE Process by a Design of Experiments Approach
by: Raphaël Boichot, et al.
Published: (2017-09-01)

Nitrogen-Polar (000 1 ¯ ) GaN Grown on c-Plane Sapphire with a High-Temperature AlN Buffer
by: Jie Song, et al.
Published: (2017-03-01)

Assessment of AlN/Mg–8Al Composites Reinforced with In Situ and/or Ex Situ AlN Particles
by: Tong Gao, et al.
Published: (2021-12-01)

Synthesis of AlN Nanowires by Al-Sn Flux Method
by: Chen, J., et al.
Published: (2022)

Optical properties of AlN layers obtained by magnetron sputtering
by: Potera Piotr, et al.
Published: (2018-12-01)

Low-Temperature Epitaxial Growth of AlN Thin Films on a Mo Electrode/Sapphire Substrate Using Reactive Sputtering
by: Jihong Kim
Published: (2021-04-01)

Roles of EvpP in Edwardsiella piscicida-Macrophage Interactions
by: Lei Qin, et al.
Published: (2020-02-01)

Berkovich Nanoindentation on AlN Thin Films
by: Jian Sheng-Rui, et al.
Published: (2010-01-01)

First Principles Study on Li-doped and Li,O-codoped AlN
by: Honglei WU, et al.
Published: (2019-01-01)

Preparation of AlN/Cu composites through a reactive infiltration process
by: Hsiu-Ching Hsu, et al.
Published: (2016-06-01)

Micromachining of AlN and Al2O3 Using Fiber Laser
by: Florian Preusch, et al.
Published: (2014-11-01)

Spark Plasma Sintering of AlN/Al Functionally Graded Materials
by: Ziyang Xiu, et al.
Published: (2021-08-01)

Development of AlN/Epoxy Composites with Enhanced Thermal Conductivity
by: Yonggang Xu, et al.
Published: (2017-12-01)

The Features of Phase Stability of GaN and AlN Films at Nanolevel
by: Ilya V. Chepkasov, et al.
Published: (2021-12-01)

Thermodynamical consideration of the synthesis of solid AlN from thermal plasma
by: Radić-Perić Jelena, et al.
Published: (2001-01-01)

Synthesis of nearly spherical AlN particles by an in-situ nitriding combustion route
by: Zhilei Wei, et al.
Published: (2021-02-01)

First-principle Studies on Ferromagnetism of Fe-doped AlN Diluted Magnetic Semiconductors
by: Honglei WU, et al.
Published: (2016-11-01)

Remuneration’s role in the EVP decision-making process
by: Van der Merwe, Stephan Johannes Marthinus
Published: (2013)

Étude de la photoluminescence de films d'AlN dopé erbium (AlN-Er) déposés par PVD magnétron RF
by: Legrand, Jérémy
Published: (2013)

First RF Power Operation of AlN/GaN/AlN HEMTs With >3 A/mm and 3 W/mm at 10 GHz
by: Austin Hickman, et al.
Published: (2021-01-01)

Heterogeneous Integration of AlN MEMS Contour-Mode Resonators and CMOS Circuits
by: Calayir, Enes
Published: (2017)

Low temperature formation of AlN nanofibers by carbothermal reduction nitridation of hydrothermal precursor fibers
by: Qinghua Yang, et al.
Published: (2017-03-01)

Synthesis of composite AlN-AlON-Al2O3 powders and ceramics prepared by high-pressure sintering
by: Vlasova M., et al.
Published: (2010-01-01)

Distribution of Dislocations near the Interface in AlN Crystals Grown on Evaporated SiC Substrates
by: Tatiana S. Argunova, et al.
Published: (2017-06-01)

Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
by: Il-Hwan Hwang, et al.
Published: (2021-04-01)

Influence of nano-AlN particles on thermal conductivity, thermal stability and cure behavior of cycloaliphatic epoxy/trimethacrylate system
Published: (2011-02-01)

<em>In Situ</em> Fabrication of AlN Coating by Reactive Plasma Spraying of Al/AlN Powder
by: Mohammed Shahien, et al.
Published: (2011-10-01)

Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications
by: H. K. Lin, et al.
Published: (2019-03-01)

The External Electric Field-Induced Tunability of the Schottky Barrier Height in Graphene/AlN Interface: A Study by First-Principles
by: Xuefei Liu, et al.
Published: (2020-09-01)

Hetero-Epitaxial Growth of AlN Deposited by DC Magnetron Sputtering on Si(111) Using a AlN Buffer Layer
by: Badis Riah, et al.
Published: (2021-09-01)

Demonstration of AlGaN/GaN MISHEMT on Si with Low-Temperature Epitaxy Grown AlN Dielectric Gate
by: Matthew Whiteside, et al.
Published: (2020-11-01)

Theoretical Analysis of SAW Propagation in 3C-SiC/c-AlN
by: Cinzia Caliendo
Published: (2016-03-01)

Effects of AlN on the densification and mechanical properties of pressureless-sintered SiC ceramics
by: Qisong Li, et al.
Published: (2016-02-01)

Studies on Carrier Recombination in GaN/AlN Quantum Dots in Nanowires with a Core–Shell Structure
by: Jun Deng, et al.
Published: (2020-11-01)

Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation
by: Jenh-Yih Juang, et al.
Published: (2013-09-01)