Calcium Phosphate Layers Deposited on Thermal Sensitive Polymer Substrates in Radio Frequency Magnetron Plasma Discharge
Calcium phosphate coatings were deposited on thermally sensitive polyprophylene substrates in radio frequency (rf) magnetron sputtering discharge. The steady state of the deposition plasma and its components were identified by deposition rate measurements and mass spectrometry. Low rf powers and dep...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-10-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/9/11/709 |