Scaling laws of nanorods in two-photon polymerization nanofabrication using a continuous scanning method

• Main Authors: Jieqiong Lin, Xian Jing, Xiaoqin Zhou, Xu Zheng, Rui Gao, Yibo Wang
• Format: Article
• Language: English
• Published: AIP Publishing LLC 2016-10-01
• Series: AIP Advances
• Online Access: http://dx.doi.org/10.1063/1.4966913

We report on the scaling laws of nanorods in two photon polymerization nanofabrication using a continuous scanning method. We focus on a cross-sectional plane of a nanorod to investigate how a moving laser focal spot effects on the photoresist. Under a hypothetical polymerizing threshold of free radicals concentration, lateral and vertical size models were established by transforming the continuously changing photon intensity to an equivalent constant value. A transformational relationship of voxels and nanorods with a same lateral size is deduced to validate the proposed models. In the experiment, voxels were obtained by an ascending scan method while nanorods were fabricated by a cantilever method. The experimental data shows a good agreement with predicted data.