Scaling laws of nanorods in two-photon polymerization nanofabrication using a continuous scanning method
We report on the scaling laws of nanorods in two photon polymerization nanofabrication using a continuous scanning method. We focus on a cross-sectional plane of a nanorod to investigate how a moving laser focal spot effects on the photoresist. Under a hypothetical polymerizing threshold of free rad...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4966913 |
| Summary: | We report on the scaling laws of nanorods in two photon polymerization nanofabrication using a continuous scanning method. We focus on a cross-sectional plane of a nanorod to investigate how a moving laser focal spot effects on the photoresist. Under a hypothetical polymerizing threshold of free radicals concentration, lateral and vertical size models were established by transforming the continuously changing photon intensity to an equivalent constant value. A transformational relationship of voxels and nanorods with a same lateral size is deduced to validate the proposed models. In the experiment, voxels were obtained by an ascending scan method while nanorods were fabricated by a cantilever method. The experimental data shows a good agreement with predicted data. |
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| ISSN: | 2158-3226 |