Electrostatic Excitation for the Force Amplification of Microcantilever Sensors

Electrostatic Excitation for the Force Amplification of Microcantilever Sensors

This paper describes an electrostatic excited microcantilever sensor operating in static mode that is more sensitive than traditional microcantilevers. The proposed sensor comprises a simple microcantilever with electrostatic excitation ability and an optical or piezoresistive detector. Initially th...

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Bibliographic Details
Main Authors: Salman Ebrahimi-Nejad, Payam Heydari, Ali Shokuhfar
Format: Article
Language:English
Published: MDPI AG 2011-10-01
Series:Sensors
Subjects:
microcantilever
force amplification
pull-in voltage
Online Access:http://www.mdpi.com/1424-8220/11/11/10129/

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