Implementations of multiphysics simulation for MEMS by coupling single-physics solvers

• Main Authors: Jian Guo, Osvaldo M. Querin
• Format: Article
• Language: English
• Published: Multi-Science Publishing 2007-09-01
• Series: International Journal of Multiphysics
• Online Access: http://journal.multiphysics.org/index.php/IJM/article/view/30

Due to the growing demands from industries, the multiphysics simulation plays a more and more important role in the design of MEMS devices. This paper presents a fast convergence scheme which implements multiphysics simulation by coupling phenomena-specific single-physics solvers. The proposed scheme is based on the traditional staggered/relaxation approach but employs the Steffensen’s acceleration technique to speed up the convergence procedure. The performance of the proposed scheme is compared with three traditional techniques: the staggered/relaxation, the multilevel Newton and the quasi-Newton methods through several examples. The results show that this scheme is promising.