Implementations of multiphysics simulation for MEMS by coupling single-physics solvers
Due to the growing demands from industries, the multiphysics simulation plays a more and more important role in the design of MEMS devices. This paper presents a fast convergence scheme which implements multiphysics simulation by coupling phenomena-specific single-physics solvers. The proposed schem...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Multi-Science Publishing
2007-09-01
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| Series: | International Journal of Multiphysics |
| Online Access: | http://journal.multiphysics.org/index.php/IJM/article/view/30 |
| Summary: | Due to the growing demands from industries, the multiphysics simulation plays a more and more important role in the design of MEMS devices. This paper presents a fast convergence scheme which implements multiphysics simulation by coupling phenomena-specific single-physics solvers. The proposed scheme is based on the traditional staggered/relaxation approach but employs the Steffensen’s acceleration technique to speed up the convergence procedure. The performance of the proposed scheme is compared with three traditional techniques: the staggered/relaxation, the multilevel Newton and the quasi-Newton methods through several examples. The results show that this scheme is promising. |
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| ISSN: | 1750-9548 2048-3961 |