Spectroscopic evaluation of vibrational temperature and electron density in reduced pressure radio frequency nitrogen plasma
Abstract The optical emission spectroscopy technique is used to determine the vibrational temperature of the second positive band system, $$ N_{2} (C,\upsilon^{^{\prime}} - B,\upsilon^{^{\prime\prime}}$$ N 2 ( C , υ ′ - B , υ ″ ) in the wavelength range 367.1–380.5 nm by using the line-ratio and Bol...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer
2021-05-01
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| Series: | SN Applied Sciences |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s42452-021-04651-z |