Recrystallization of InSb Surfaces Induced by Pulsed Lasers

Pulsed laser processing of InSb wafers for the application in designing high speed infrared detectors is studied both theoretically and experimentally. The recrystallization of InSb surfaces resulting in restoration of the implanted region to a single crystal state is presented as a reasonable a...

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Bibliographic Details
Main Authors: R. Černý, P. Přikryl, G. Ivlev, E. Gatskevich, V. Cháb
Format: Article
Language:English
Published: CTU Central Library 2000-01-01
Series:Acta Polytechnica
Online Access:https://ojs.cvut.cz/ojs/index.php/ap/article/view/42