Hybrid Shape Memory Alloy-Based Nanomechanical Resonators for Ultrathin Film Elastic Properties Determination and Heavy Mass Spectrometry
Micro-/nanomechanical resonators are often used in material science to measure the elastic properties of ultrathin films or mass spectrometry to estimate the mass of various chemical and biological molecules. Measurements with these sensors utilize changes in the resonant frequency of the resonator...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-10-01
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| Series: | Materials |
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| Online Access: | https://www.mdpi.com/1996-1944/12/21/3593 |