Hybrid Shape Memory Alloy-Based Nanomechanical Resonators for Ultrathin Film Elastic Properties Determination and Heavy Mass Spectrometry

Micro-/nanomechanical resonators are often used in material science to measure the elastic properties of ultrathin films or mass spectrometry to estimate the mass of various chemical and biological molecules. Measurements with these sensors utilize changes in the resonant frequency of the resonator...

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Bibliographic Details
Main Authors: Ivo Stachiv, Lifeng Gan
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/12/21/3593