Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests

Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests

Confocal microscopy is introduced as a new and generally applicable method for the characterization of the vertically-aligned carbon nanotubes (VACNT) forest height. With this technique process control is significantly intensified. The topography of the substrate and VACNT can be mapped with a heigh...

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Bibliographic Details
Main Authors: Markus Piwko, Holger Althues, Benjamin Schumm, Stefan Kaskel
Format: Article
Language:English
Published: MDPI AG 2015-08-01
Series:Coatings
Subjects:
vertically aligned carbon nanotubes
forest height characterization
confocal microscopy
optical imaging
chemical vapor deposition
Online Access:http://www.mdpi.com/2079-6412/5/3/477
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spelling doaj-6b41a5dd0b3b4b4dacd1b90f91f93da82020-11-24T23:59:44ZengMDPI AGCoatings2079-64122015-08-015347748710.3390/coatings5030477coatings5030477Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube ForestsMarkus Piwko0Holger Althues1Benjamin Schumm2Stefan Kaskel3Fraunhofer Institute for Material and Beam Technology (IWS), Winterbergstraße 28, 01277 Dresden, GermanyFraunhofer Institute for Material and Beam Technology (IWS), Winterbergstraße 28, 01277 Dresden, GermanyFraunhofer Institute for Material and Beam Technology (IWS), Winterbergstraße 28, 01277 Dresden, GermanyFraunhofer Institute for Material and Beam Technology (IWS), Winterbergstraße 28, 01277 Dresden, GermanyConfocal microscopy is introduced as a new and generally applicable method for the characterization of the vertically-aligned carbon nanotubes (VACNT) forest height. With this technique process control is significantly intensified. The topography of the substrate and VACNT can be mapped with a height resolution down to 15 nm. The advantages of confocal microscopy, compared to scanning electron microscopy (SEM), are demonstrated by investigating the growth kinetics of VACNT using Al2O3 buffer layers with varying thicknesses. A process optimization using confocal microscopy for fast VACNT forest height evaluation is presented.http://www.mdpi.com/2079-6412/5/3/477vertically aligned carbon nanotubesforest height characterizationconfocal microscopyoptical imagingchemical vapor deposition
collection DOAJ
language English
format Article
sources DOAJ
author Markus Piwko
Holger Althues
Benjamin Schumm
Stefan Kaskel
spellingShingle Markus Piwko
Holger Althues
Benjamin Schumm
Stefan Kaskel
Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests
Coatings
vertically aligned carbon nanotubes
forest height characterization
confocal microscopy
optical imaging
chemical vapor deposition
author_facet Markus Piwko
Holger Althues
Benjamin Schumm
Stefan Kaskel
author_sort Markus Piwko
title Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests
title_short Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests
title_full Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests
title_fullStr Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests
title_full_unstemmed Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests
title_sort confocal microscopy for process monitoring and wide-area height determination of vertically-aligned carbon nanotube forests
publisher MDPI AG
series Coatings
issn 2079-6412
publishDate 2015-08-01
description Confocal microscopy is introduced as a new and generally applicable method for the characterization of the vertically-aligned carbon nanotubes (VACNT) forest height. With this technique process control is significantly intensified. The topography of the substrate and VACNT can be mapped with a height resolution down to 15 nm. The advantages of confocal microscopy, compared to scanning electron microscopy (SEM), are demonstrated by investigating the growth kinetics of VACNT using Al2O3 buffer layers with varying thicknesses. A process optimization using confocal microscopy for fast VACNT forest height evaluation is presented.
topic vertically aligned carbon nanotubes
forest height characterization
confocal microscopy
optical imaging
chemical vapor deposition
url http://www.mdpi.com/2079-6412/5/3/477
work_keys_str_mv AT markuspiwko confocalmicroscopyforprocessmonitoringandwideareaheightdeterminationofverticallyalignedcarbonnanotubeforests
AT holgeralthues confocalmicroscopyforprocessmonitoringandwideareaheightdeterminationofverticallyalignedcarbonnanotubeforests
AT benjaminschumm confocalmicroscopyforprocessmonitoringandwideareaheightdeterminationofverticallyalignedcarbonnanotubeforests
AT stefankaskel confocalmicroscopyforprocessmonitoringandwideareaheightdeterminationofverticallyalignedcarbonnanotubeforests
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