Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests

Confocal Microscopy for Process Monitoring and Wide-Area Height Determination of Vertically-Aligned Carbon Nanotube Forests

Confocal microscopy is introduced as a new and generally applicable method for the characterization of the vertically-aligned carbon nanotubes (VACNT) forest height. With this technique process control is significantly intensified. The topography of the substrate and VACNT can be mapped with a heigh...

Full description

Bibliographic Details
Main Authors: Markus Piwko, Holger Althues, Benjamin Schumm, Stefan Kaskel
Format: Article
Language:English
Published: MDPI AG 2015-08-01
Series:Coatings
Subjects:
vertically aligned carbon nanotubes
forest height characterization
confocal microscopy
optical imaging
chemical vapor deposition
Online Access:http://www.mdpi.com/2079-6412/5/3/477
Description
Summary:Confocal microscopy is introduced as a new and generally applicable method for the characterization of the vertically-aligned carbon nanotubes (VACNT) forest height. With this technique process control is significantly intensified. The topography of the substrate and VACNT can be mapped with a height resolution down to 15 nm. The advantages of confocal microscopy, compared to scanning electron microscopy (SEM), are demonstrated by investigating the growth kinetics of VACNT using Al2O3 buffer layers with varying thicknesses. A process optimization using confocal microscopy for fast VACNT forest height evaluation is presented.
ISSN:2079-6412

Similar Items