Simulation and Experimental Verification of Edge Blurring Phenomenon in Microdefect Inspection Based on High-Frequency Ultrasound
Acoustic micro-imaging based on high-frequency ultrasound has been widely and effectively used for microdefect detection in microelectronic packages. With the miniaturization of microelectronic devices and the reduction of defects, edge blurring occurs in high-frequency ultrasonic scanning and direc...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8610298/ |