Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography

Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography

In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2 nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various oper...

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Bibliographic Details
Main Authors:	Chao-Hao Chen, Chun-Yen Kuo, Yu-Hsuan Ho, Wei-Cheng Tian
Format:	Article
Language:	English
Published:	MDPI AG 2013-01-01
Series:	Sensors
Subjects:	temperature effect TiO2 nanowire gas sensors electro-beam lithography
Online Access:	http://www.mdpi.com/1424-8220/13/1/865

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