Thermal Atomic Layer Deposition of Yttrium Oxide Films and Their Properties in Anticorrosion and Water Repellent Coating Applications

Thermal Atomic Layer Deposition of Yttrium Oxide Films and Their Properties in Anticorrosion and Water Repellent Coating Applications

The thermal atomic layer deposition (ThALD) of yttrium oxide (Y<sub>2</sub>O<sub>3</sub>) was developed using the newly designed, liquid precursor, Y(EtCp)<sub>2</sub>(<i><sup>i</sup></i>Pr<sub>2</sub>-amd), as the yttrium sourc...

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Bibliographic Details
Main Authors:	Christian Dussarrat, Nicolas Blasco, Wontae Noh, Jooho Lee, Jamie Greer, Takashi Teramoto, Sunao Kamimura, Nicolas Gosset, Takashi Ono
Format:	Article
Language:	English
Published:	MDPI AG 2021-04-01
Series:	Coatings
Subjects:	heteroleptic precursor thermal atomic layer deposition yttrium oxide plasma-resistant coating water contact angle
Online Access:	https://www.mdpi.com/2079-6412/11/5/497

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