Interferometer adopting a ball lens both as a beam collimator and a reflector
We aim to develop an alignment monitor, which consists of a length measurement grid of absolute distance interferometers, where we adopt a ball lens both as a beam collimator and a reflector. Collimated beams by the ball lenses were evaluated to have clear 2-dimensional circular gaussian distributio...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421001240 |