Artificial intelligence system for technical diagnostics of photomasks

The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to mak...

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Bibliographic Details
Main Authors: Kozin A. A., Kozina Yu. Yu.
Format: Article
Language:English
Published: Politehperiodika 2012-02-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:http://www.tkea.com.ua/tkea/2012/1_2012/pdf/02.zip
Description
Summary:The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to make a small-scale production profitable.
ISSN:2225-5818